Phenyl Glycoluril Crosslinker CAS 721969-01-3 – Ultra High Purity Supplier for ArF KrF Lithography

Specification of Imidazo[4,5-D]Imidazole-2,5(1H,3H)-Dione, Tetrahydro-1,3,4,6-Tetrakis(Methoxymethyl)-3a-Methyl-6a-Phenyl-

Name	Imidazo[4,5-d]Imidazole-2,5(1H,3H)-dione, tetrahydro-1,3,4,6-tetrakis(methoxymethyl)-3a-methyl-6a-phenyl-
CAS Number	721969-01-3
Molecular Formula	C₁₉H₂₈N₄O₆
Structural Formula
Applications	Applied in semiconductor materials, photoresists, ArF and KrF photoresist fields.
Purity	Specification 1:Purity≥99.5%,Total metal impurities≤500ppb Specification 2:Purity≥99.9%,Single metal impurity≤10ppb
Packaging Specification	kg/bag, 25 kg/drum

Applications of Imidazo[4,5-D]Imidazole-2,5(1H,3H)-Dione, Tetrahydro-1,3,4,6-Tetrakis(Methoxymethyl)-3a-Methyl-6a-Phenyl-

In semiconductors and photoresists, it is dedicatedly used as an ultra high purity crosslinker in ArF and KrF photoresist formulations for advanced node chip manufacturing.

FAQ

Q1:What ultra-pure grades are offered for ArF/KrF photoresists?

A:Two specs: ≥99.5% (total impurities ≤500ppb) and ≥99.9% (single metal ≤10ppb).

Q2:What analytical instruments test trace metals?

A:High-sensitivity ICP-MS is utilized for full-element trace metal analysis.

Q3:How to request samples under an NDA?

A:Upon executing an NDA, ultra-pure photoresist samples ship within 5 business days.