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N,N,N′,N′-Tetrakis(butoxymethyl)urea CAS 43539-97-1

CAS No.: 43539-97-1

Molecular Formula: C21H44N2O5

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Specifications of N,N,N′,N′-Tetrakis(butoxymethyl)urea CAS 3089-11-0

NameN,N,N′,N′-Tetrakis(butoxymethyl)urea
CAS Number43539-97-1
Molecular FormulaC₂₁H₄₄N₂O₅
Structural Formulan n n n tetrakis butoxymethyl urea 43539 97 1 bulk
ApplicationsSemiconductor materials, photoresists, ArF, KrF
PurityGrade 1: Purity ≥99.5%, total impurities ≤500 ppb
Grade 2: Purity ≥99.9%, single metal impurity ≤10 ppb
Packaging Specification20 kg/drum, 25 kg/drum
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