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| Name | N,N,N′,N′-Tetrakis(butoxymethyl)urea |
| CAS Number | 43539-97-1 |
| Molecular Formula | C₂₁H₄₄N₂O₅ |
| Structural Formula | ![]() |
| Applications | Semiconductor materials, photoresists, ArF, KrF |
| Purity | Grade 1: Purity ≥99.5%, total impurities ≤500 ppb Grade 2: Purity ≥99.9%, single metal impurity ≤10 ppb |
| Packaging Specification | 20 kg/drum, 25 kg/drum |
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