Specification 1:Purity≥99.5%,Total metal impurities≤500ppb
Specification 2:Purity≥99.9%,Single metal impurity≤10ppb
| Name | N,N,N′,N′-Tetrakis(butoxymethyl)urea |
| CAS Number | 43539-97-1 |
| Molecular Formula | C₂₁H₄₄N₂O₅ |
| Structural Formula | ![]() |
| Applications | Semiconductor materials, photoresists, ArF, KrF |
| Purity | Grade 1: Purity ≥99.5%, total impurities ≤500 ppb Grade 2: Purity ≥99.9%, single metal impurity ≤10 ppb |
| Packaging Specification | 20 kg/drum, 25 kg/drum |
In semiconductor microelectronics, it acts as a proprietary core crosslinker for high end photoresists and ultra fine ArF and KrF lithography, featuring ultra low trace metal residues.
Q1:How low are the metal impurities for advanced photoresists?
A:Top tier specification achieves single metal ≤10ppb and total impurities ≤500ppb.
Q2:What container sizes are provided?
A:Dedicated 20kg and 25kg ultra-clean electronic drums.
Q3:Can you attach a full ICP-MS element analysis report?
A:Electronic grade shipments include a comprehensive ICP-MS trace element report.
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