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| Name | Imidazo[4,5-d]Imidazole-2,5(1H,3H)-dione, tetrahydro-1,3,4,6-tetrakis(methoxymethyl)-3a-methyl-6a-phenyl- |
| CAS Number | 721969-01-3 |
| Molecular Formula | C₁₉H₂₈N₄O₆ |
| Structural Formula | ![]() |
| Applications | Applied in semiconductor materials, photoresists, ArF and KrF photoresist fields. |
| Purity | Grade 1: ≥99% |
| Grade 2: ≥99%, total metal impurities ≤50 ppb | |
| Packaging Specification | kg/bag, 25 kg/drum |
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